O12: Depth Profiling
Thursday 14 October 2021

CEST start time	Author local time	Title
Chair: Jaap Van Den Berg
12:00	12:00	Assessing the quality of 3D-printed ALD films by Low Energy Ion Scattering Thomas Grehl, IONTOF GmbH, Germany
12:15	12:15	Filtering Properties of Epitaxial Boron Nitride Adrianna Wójcik, Łukasiewicz Research Network - Institute of Microelectronics and Photonics, Poland
12:30	12:30	Atomic depth-resolution characterization of MAX and MXenes using ultra-low energy secondary ion mass spectrometry Paweł Piotr Michałowski, Łukasiewicz Research Network - Institute of Microelectronics and Photonics, Poland
12:45	07:45	Depth profiling of ion-implanted in 2D and 3D samples by high-energy electron scattering Henrique Trombini, Universidade Federal de Ciências da Saúde de Porto Alegre, Brazil

Registration deadline:

10 October 2021 [extended]

Please click here to find out more about our virtual exhibitors (in Gather Town) and virtual sponsors.