O12: Depth Profiling
Thursday 14 October 2021

CEST start time Author local time Title 
Chair: Jaap Van Den Berg
12:00 12:00

Assessing the quality of 3D-printed ALD films by Low Energy Ion Scattering

Thomas Grehl, IONTOF GmbH, Germany

12:15 12:15

Filtering Properties of Epitaxial Boron Nitride

Adrianna Wójcik, Łukasiewicz Research Network - Institute of Microelectronics and Photonics, Poland

12:30 12:30

Atomic depth-resolution characterization of MAX and MXenes using ultra-low energy secondary ion mass spectrometry

Paweł Piotr Michałowski, Łukasiewicz Research Network - Institute of Microelectronics and Photonics, Poland

12:45 07:45

Depth profiling of ion-implanted in 2D and 3D samples by high-energy electron scattering

Henrique Trombini, Universidade Federal de Ciências da Saúde de Porto Alegre, Brazil


Key dates

Registration deadline:

10 October 2021 [extended]


Virtual exhibition and sponsorship

Please click here to find out more about our virtual exhibitors (in Gather Town) and virtual sponsors.